Improving product quality and reducing losses in clean room production
A key challenge facing semiconductor industry is production losses due to Airborne Molecular Contamination (AMC) in the form of vapours & aerosols that affect microscale manufacturing.
Project develops spectroscopic techniques and reference materials to measure priority AMCs at lower concentrations and faster rates than is currently possible.
WP1: Spectroscopy – Instrumentation
WP2: High accuracy reference materials to underpin measurements of priority AMCs
WP3: Demonstrating the project output in an industrial setting
VTT MIKES develops and characterises a trace gas analyser allowing simultaneous sensing of HCl, NH3 and HF at the nmol/mol level.
More information: Timo Rajamäki, tel.
+358 50 573 2823,
Project website: http://empir.npl.co.uk/metamcii/