3DNano: Traceable three-dimensional nanometrology

2016–2019          Traceable calibration services for 3D nanometrologyVirpi.jpg

A need to improve accuracy in 3D nanometrology measurements has arisen
from progressive miniaturisation of advanced nanomanufacturing.

Project aims to meet current and future requirements for 3D traceable dimensional metrology at nanometre level with uncertainties less than 1 nm.

MIKES reduces the noise level of its metrological atomic force microscope to
0.1 nm and develops reference materials for calibration of 3D-nanometrology measurements.

More information: Virpi Korpelainen, tel. +358 50 410 5504, virpi.korpelainen(at)vtt.fi

Project website: https://www.ptb.de/emrp/15sib09-home.html